In fact, the technology in the field of ultra-precision machining technology involved is very rich. In Beijing Machine Tool Research Institute 30 years of research history, for ultra-precision machining technology involved in related technologies, LIU Bing industry systematically summarizes the key aspects of cutting-edge research 36 and 11 leading core technology. Among them, the key to cutting-edge research, including design, moving parts, measurement and analysis, technology, manufacturing technology and machine host application conditions Technical six aspects. Leading core technology include: ultra-precision spindle key structural precision manufacturing technology, precision ultra-precision linear motion components critical structures manufacturing technology, high-resolution motion drive technology, process manufacturing technology machine key parts, components against external interference characteristics technologies , structure and manufacturing technology for high stability rapid linear motion, multi-axis machine movement nested structure design technology, as well as the target machine parts manufacturing integrated manufacturing technology and so on.

　　"In the precision machine tools from micron to nano-scale development process, there are three key technologies can not be avoided, these three technologies is to study the threshold nanometer precision machine tools." Liu Bing industry analysis, said one of the technologies is no lag in bearing technology hysteresis phenomena in mechanical systems abound, the hysteresis phenomenon is not only seriously affect the positioning accuracy of the machine slide plate and repeat positioning accuracy, but also affect the movement to achieve high resolution, but also affect the accuracy of precision parts machining shape and surface roughness . The hydrostatic bearing technology can solve mechanical hysteresis phenomenon, and can be homogenized geometric errors, has been widely used in ultra-precision machine tools. HIP technology in the past ten years has made significant progress, self-compensating feedback technology is more mature. With flow control throttle technology enables hydrostatic bearing stiffness been improved significantly, making ultra-precision machining of material hardness continues to increase.

　　The other two key technologies are driving technology and high-resolution micro-mechanical system vibration processing techniques. Nanometer resolution is the last decade of ultra-precision machine tool performance characteristics reflected many factors movement. Meanwhile, a large number of experimental studies have found that 10 nanometer vibration signals exist in many mechanical actuators, for the execution and measurement of mechanical sensitivity cause interference, such vibrations are called micro-vibration. "Micro-vibration mechanism for in-depth study and to seek solutions is ultra-precision machine tools leading to nanometer precision pass.